- 정밀기기가 탑재된 방진대의 주파수성형 슬라이딩모드 제어
- ㆍ 저자명
- 김효준,박영필
- ㆍ 간행물명
- 한국소음진동공학회논문집
- ㆍ 권/호정보
- 2002년|12권 2호|pp.124-131 (8 pages)
- ㆍ 발행정보
- 한국소음진동공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents the design of an active vibration suppression controller for an air-spring type vibration isolation table. Firstly, isolation system model is constructed considering the isolation table, attached equipment and voice-coil actuator. An active control system is designed based on frequency-shaped sliding mode control theory rewarding high frequency uncertainties with respect to attached equipments on the isolation table. Finally. the performance of the active isolation system is evaluated by simulation under some disturbance conditions which are transmitted from base structure of the isolation system.