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Effects of Deposition Temperature and Annealing Process on PZT Thin Films Prepared by Pulsed Laser Deposition
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  • Effects of Deposition Temperature and Annealing Process on PZT Thin Films Prepared by Pulsed Laser Deposition
  • Effects of Deposition Temperature and Annealing Process on PZT Thin Films Prepared by Pulsed Laser Deposition
저자명
Kim. Min-Chul,Choi. Ji-Won,Kang. Chong-Yun,Yoon. Seok-Jin,Kim. Hyun-Jai,Yoon. Ki-Hyun
간행물명
Transactions on electrical and electronic materials
권/호정보
2002년|3권 1호|pp.14-17 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The effects of substrate temperatures and annealing temperatures on the microstructures and ferroelectric properties of PbZ $r_{0.52}$ $Ti_{0.48}$ $O_3$(PZT) thin fims prepared by pulsed laser deposition (PLD) were investigated. For this purpose, the PZT films were deposited at various substrate temperatures (400~$600^{circ}C$) with post annealing process in oxygen atmosphere. The single perovskite phase was formed at the deposition temperature of 500 to 55$0^{circ}C$ without post annealing and the PZT films deposited below 50$0^{circ}C$ formed the single phase with post annealing at $650^{circ}C$. The grain size of the films increased and the grain boundary of the films was clearly defined as the substrate temperature increased from 400 to 55$0^{circ}C$. The remnant polarization (Pr) and the coercive field (Ec) of the films deposited at 55$0^{circ}C$ and annealed at $650^{circ}C$ were 34.3 $mu$C/c $m^2$and 60.2 kV/cm, respectively.y.y.