Finite element program(ANSYS) estimated thermal deformation quantity in high frequency heat treatment process of a machine tool fred drive system slideway and apply deformation quantity in roughing process. Having processed the heat treatment minimizing methods of the quantity of deformation heat treatment process. Having done heat treatment with high frequency after taper processing with considering the existed heat treatment generating the quantity of deformation, existed quantity of deformation can be reduced down to 80%, consequently productivity and material saving can be achieved. When high frequency heat treatment finite element method estimated deformation quantity at difference temperature and time, it is progress at cost don and saved time.