- MOCVD 성장조건이 InN/GaN 다층박막의 발광세기에 미치는 영향
- ㆍ 저자명
- 김현수,이정주,정순영,이정용,Kim. Hyeon-Su,Lee. Jeong-Ju,Jeong. Sun-Yeong,Lee. Jeong-Yong
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2002년|12권 3호|pp.190-194 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
InN/GaN multi-layers were grown by metalorganic chemical vapor deposition(MOCVD) in order to get the appropriate structure for an high power blue-green light emitting diode(LED), and effects of growth conditions (growth temperature, pressure, and $trimethylindium(TMIn)-NH_3-N_2; flow; rare)$ on the integrated photoluminescence (PL) intensity and PL peak energy in InN/GaN multi-layers were investigated. The optimized growth conditions with the highest integrated PL intensity for InN/GaN multi-layers were obtained: the growth temperature at $780^{circ}C$, the growth pressure at 325 Torr, the TMIn flow rate with 150 $mell$/min, the $NH_3$flow rate with 3.2 ι/min, and $N_2$ flow rate with 2 ι/min.