- MOVPE법으로 GaN위에 성장시킨 A11-xInxN 박막의 광학적 특성
- ㆍ 저자명
- 신동원,김성익,허증수,Sin. Dong-Won,Kim. Seong-Ik,Heo. Jeung-Su
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2002년|12권 2호|pp.112-116 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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We studied optical properties of $Al_{1-x}In_xN$ films. Films were grown on GaN by metalorganic vapor-phase epitaxy. The AlInN layer was grown on GaN layer with an $alpha$-Al$_2$O$_3$substrate. X-ray diffraction, optical absorption spectroscopy, photoluminescence(PL) and reflection high energy electron diffraction(RHEED) measurements of AlInN showed that the crystalline quality of $Al_{1-x}In_xN$ layer was improved around x=0.17, at which the lattice constant was matched to the GaN and the band gap of AlInN is larger than that of GaN.