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저자명
박호준,임근배,손상영,송인섭,박정호,Park. Ho-Jun,Im. Geun-Bae,Son. Sang-Yeong,Song. In-Seop,Park. Jeong-Ho
간행물명
전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문
권/호정보
2002년|51권 9호|pp.449-454 (6 pages)
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대한전기학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A rectangular straight microchannel, integrated with the resistance temperature detectors(RTDs) for temperature sensing and a micro-heater for generating the Temperature gradient along the channel, was fabricated. Its dimension is 57${mu}{ extrm}{m}$(H)$ imes$200${mu}{ extrm}{m}$(W)$ imes$48,050${mu}{ extrm}{m}$(L), and RTDs were placed at the inner-channel wall. Si wafer was used as a substrate. For the fabrication of RTDs, 5300$AA$ thick Pt/Ti layer was sputtered on a Pyrex glass wafer. Finally, the glass wafer was bonded with Si wafer by anodic bonding, so that the RTDs are located inside the microchannel. Temperature coefficient of resistance(TCR) values of the fabricated Pt-RTDs were 2800~2950ppm$^{circ}C$ and the variation of TCR value In the range of O~10$0^{circ}C$ was less than 0.3%. Therefore, it was proved that the fabricated Pt-RTDs without annealing were excellent as temperature sensors. The temperature distribution in the microchannel was investigated as a function of mass flow rate and heating power. The temperature increase rate diminished with decreasing the applied power and increasing the mass flow rate. It was confirmed from the comparison with the simulation results that the temperature measured inside the microchannel is more accurate than measuring the temperature measured at the outer wall. The proposed temperature sensing method and microchannel are expected to be useful in microfluidics researches.

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