A new position correction method using four fiducials as reference points was developed and examined. It was aimed to calibrate nonlinear deformation by numerous error sources. A correlation for correction was derived from the geometric relationship between four fiducials and chip position. Compared with three points method, it exhibited more accurate correction, especially for inner area of a quadrilateral composed of four fiducial points. Its accuracy was found to be increased as fiducials moves outwardly within a printed circuit board (PCB) and/or as they form more rectangle-like shape As for arbitrarily nonlinear deformation, this method can be applied using more than five fiducials. In this case, local-area calibration is carried out by sectioning a board area into several rectangular are as.