Solid state deformation of PZT is effective for the micron scale displacement. Inch-worm gets large linear displacement by incrementally summing displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the small size and light weight of inch-worm. Mechanical vibration induced by low stiffness may degenerate the motion accuracy of the inch-worm. In this paper, dynamic characteristics of the inch-worm are modeled by using the frequency domain curve fitting based on the experimental frequency response function. SMC (sliding mode control) is examined for motion control of the inch-worm. Simulation and experimental results show that the inch-worm with SMC scheme is feasible for the precise displacement device.