- 미세탐침기반 기계-화학적 리소그래피공정에 의한 마이크로/나노패턴 제작
- ㆍ 저자명
- 성인하,김대은
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2002년|19권 11호|pp.228-233 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.