- PLT 박막에서 조성에 따른 동적 초전특성의 주파수 의존성에 관한 연구
- ㆍ 저자명
- 차대은,장동훈,강성준,윤영섭
- ㆍ 간행물명
- 電子工學會論文誌. Journal of the Institute of Electronics Engineers of Korea. SD, 반도체
- ㆍ 권/호정보
- 2002년|39권 10호|pp.35-42 (8 pages)
- ㆍ 발행정보
- 대한전자공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Modulation frequency dependences of the pyroelectric properties of PLT (P $b_{1-x}$ L $a_{x}$ $Ti_{1-x}$ 4/ $O_3$) thin films with La concentrations of 5, 10 and 15㏖% have been investigated by using the dynamic method. The PLT thin film with 10㏖% of the La concentration (PLT(10) thin film) shows the most excellent pyroelectric properties among the films. For PLT(10) thin film, the pyroelectric coefficient shows the maximum value of 6.6$ imes$10$^{-9}$ C/$ extrm{cm}^2$ㆍK without frequency dependence. The figure of merits for the voltage responsivity and specific detectivity are 1.03$ imes$10$^{-11}$ Cㆍcm/J and 1.46$ imes$10$^{-9}$ Cㆍcm/J, respectively. Voltage responsivity corresponding to the pyroelectric voltage is almost constant at low modulation frequency and decreases in proportional to frequency at high modulation frequency. Voltage responsivity is 5.15 V/W at 8Hz. Noise equivalent power (NEP) and specific detectivity ( $D^{*}$) of the PLT(10) thin film are 9.93$ imes$10$^{-8}$ W/H $z^{1}$2/ and 1.81$ imes$10$^{6}$ cmH $z^{1}$2/W at the frequency of 100Hz, respectively. The results indicate that PLT(10) thin film is very suitable for pyroelectric IR sensors.s.s.