There are many effective parameters to high concentration ozone generation. These parameters became very important elements should be considered before designing ozone generator. After designing, there are many peripheral parameters to greatly affect to high concentration ozone generation also. In this study, of many effective peripheral parameters on high concentration ozone generation, the effects of flow rate of inlet oxygen gas and some kinds of additional gases on ozone concentration were investigated As a result, when inlet oxygen gas was introduced at the range of 0.75［LPM］～2.00［LPM］ the highest ozone concentration of 71145［ppm］ was obtained at 1.25［LPM］. When the additional nitrogen gas was mixed to oxygen gas at the range of 0.0［vol%]～6.4［vol%］ the highest ozone concentration of 73135［ppm］ was obtained at 0.8［vol%］ of nitrogen gas. This showed 3［%］ increasing compared to the case of pure oxygen gas inlet. When the additional argon gas was mixed to oxygen gas at the range of 0.0［vol%］～6.4［vol%］ the highest concentration of 67288［ppm］was obtained at 0.8［vol%］of argon gas. This is decreased value compared to that of introducing the pure oxygen.