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아크 이온 플레이팅법에 의해 증착된 TiN과 TiAlN 박막의 기계적 특성 비교
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  • 아크 이온 플레이팅법에 의해 증착된 TiN과 TiAlN 박막의 기계적 특성 비교
저자명
윤석영,이윤복,김광호
간행물명
한국표면공학회지
권/호정보
2002년|35권 4호|pp.199-205 (7 pages)
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한국표면공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

TiN and TiAlN films were deposited on SKD 11 steel substrates by an arc ion plating (AIP) technique. The crystallinity and morphology for the deposited films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The mechanical properties of both films were investigated through the indentation, impact, and wear test. Those films fairly adherent to SKD 11 steel substrate, showed hardness values of 2300 $pm$ 100kg/$ extrm{mm}^2$ and 3200 $pm$ 100kg/$ extrm{mm}^2$ with a load of 25g, respectively. During impact test, TiAlN films showed much superior impact wear resistance to TiN films. It could be suggested that the TiN films was failed relatively by plastic deformation with oxidation during impact test, while TiAlN films was failed by brittle fracture and resisted the oxidation by the impact energy. The friction coefficient of TiAlN films became lower than that of TiN films at high sliding speed condition although it was higher than that of TiN films at low speed. Therefore, TiAlN films was suggested to be more advantageous than TiN films for high speed machining fields.