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서지반출
Measurement of Ion-induced Secondary Electron Emission Yield of MgO Films by Pulsed Ion Beam Method
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  • Measurement of Ion-induced Secondary Electron Emission Yield of MgO Films by Pulsed Ion Beam Method
  • Measurement of Ion-induced Secondary Electron Emission Yield of MgO Films by Pulsed Ion Beam Method
저자명
Lee. Sang-Kook,Kim. Jae-Hong,Lee. Ji-Hwa,Whang. Ki-Woong
간행물명
Journal of information display
권/호정보
2002년|3권 1호|pp.17-21 (5 pages)
발행정보
한국정보디스플레이학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Measurement of the ion-induced secondary electron emission coefficient (${gamma}_i$) for insulating films is hampered by an unavoidable charging problem. Here, we demonstrate that a pulsed ion beam technique is a viable solution to the problem, allowing for accurate measurement of ${gamma}_i$ for insulating materials. To test the feasibility of the pulsed ion beam method, the secondary electron emission coefficient from n-Si(100) is measured and compared with the result from the conventional continuous beam method. It is found that the ${gamma}_i$ from n-Si(100) by the ion pulsed beam measured to be 0.34, which is the same as that obtained by continuous ion beam. However, for the 1000 A $SiO_2$ films thermally deposited on Si substrate, the measurement of ${gamma}_i$ could be carred out by the pulsed ion method, even though the continuous beam method faced charging problem. Thus, the pulsed ion beam is regarded to be one of the most suitable methods for measuring secondary electron coefficient for the surface of insulator materials without experiencing charging problem. In this report, the dependence of ${gamma}_i$ on the kinetic energy of $He^+$ is presented for 1000 ${AA}$ $SiO_2$ films. And the secondary electron emission coefficient of 1000 ${AA}$ MgO e-beam-evaporated on $SiO_2/Si$ is obtained using the pulsing method for $He^+$ and $Ar^+$ with energy ranging from 50 to 200 eV, and then compared with those from the conventional continuous method.