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IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성
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  • IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성
저자명
박지현,양승호,공호성,장경영,윤의성,Park. Ji-Hyun,Yang. Seung-Ho,Kong. Ho-Seung,Jhang. Kyung-Young,Yoon. Eui-Sung
간행물명
윤활학회지
권/호정보
2002년|18권 1호|pp.1-8 (8 pages)
발행정보
한국윤활학회
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정기간행물|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Nano adhesion and friction between a $Si_{3}N_{4}$ AFM(atomic force microscope) tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM and LFM(lateral force microscope) modes in various range of normal loads. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and other Si-wafers of different surface roughness were used. Results showed that nano adhesion and friction decreased with the surface roughness. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the load was low.