- Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
- Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
- ㆍ 저자명
- Jung. Jung Gun,Kim. Jong Suk,Park. Jae Yoon,Kim. Kwang Soo,Rim. Geun Hie
- ㆍ 간행물명
- Transactions on electrical and electronic materials
- ㆍ 권/호정보
- 2003년|4권 4호|pp.30-35 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
