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Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
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  • Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
  • Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
저자명
Jung. Jung Gun,Kim. Jong Suk,Park. Jae Yoon,Kim. Kwang Soo,Rim. Geun Hie
간행물명
Transactions on electrical and electronic materials
권/호정보
2003년|4권 4호|pp.30-35 (6 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, the $CF_4$ decomposition efficiency is investigated for three simulated plasma reactors that are needle plate reactor, metal particle reactor, and dielectric barrier reactor with hole (DBH). The$CF_4$ decomposition efficiency by DBH is much better than that by needle plate reactor or metal particle reactor. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the $CF_4$ decomposition efficiency is increased. The $CF_4$ decomposition efficiency in needle plate reactor and metal particle reactor is about $12\%$ and $22\%$ respectively at applied voltage of 23 kV (consumption power: 110 W) and $CF_4$ concentration of 500 ppm, however, the $CF_4$ decomposition efficiency is more than $95\%$ in case of DBH. DBH should be much better than two reactors investigated for $CF_4$ decomposition.