In this study, micro electrochemical machining method was introduced for accomplishment the fabrication technology of functional parts and smart structures using the Ni-Ti shape memory alloy. From the experimental result, the micro part which has very fine surface could be achieved by use of micro electrochemical process with point electrode method. Concretely, the optimal performance of micro electrochemical process in Ni-Ti SMA was obtained at the condition of approximately 100% of current efficiency and high frequency pulse current. That is, much finer surface integrity and shape memory effect can be obtained at the same condition mentioned above.