A robust motion control method is proposed fur the point-to-point position control of a XY positioning system which consists of a base cart, elastic ben and moving mass. The horizontal motion controller consists of the feedforward controller to suppress the single mode vibration of the elastic beam and the feedback controller to get the high-accuracy positioning performance of the base cart. Input preshaping vibration suppression method based on system modeling with analytic frequency equation is proposed and integrated into the robust internal-loop compensator(RIC) to increase the robustness of the whole closed-loop system The vertical motion controller is proposed based on the dual RIC structure. Through experiments, it is shown that the proposed method can stabilize the system and suppress the vibration in the presence of uncertainties and disturbances