In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system are proposed for the reduction of the vibration. In the respect of modeling, the spin-coater system is considered to be composed of servomotor, spindle, supporting base and so on. Each component of model is combined and derived to 3 dimensional equations. The combined model is verified by experimental values of actual system in the frequency domain. By direct differentiation of the constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, rotational stiffness and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables are selected from the sensitivity analysis.