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Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications
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  • Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications
  • Orientation Control and Dielectric Properties of Sol-gel Deposited (Ba,Sr)TiO3 Thin Films for Room-temperature Tunable Element Applications
저자명
Zhai. Jiwei,Chen. Haydn
간행물명
한국세라믹학회지
권/호정보
2003년|40권 4호|pp.380-384 (5 pages)
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한국세라믹학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The effects of the mole concentrations of precursor solution on the microstructure and dielectric properties of sol-gel deposited $Ba_{0.85}$S $r_{0.15}$Ti $O_3$(BST) thin films have been investigated. The films were of single perovskite phase with strong (100) preferred orientation when grown on LaNi0$_3$ buffered Pt/Ti/ $SiO_2$Si substrates using a diluted precursor solution. Variation of the precursor solution concentration resulted in a different microstructure and, in turn, affected the tunability of the sol-gel deposited films. It was observed that leakage currents increased asymmetrically for the negative and positive bias voltage with decreasing thickness. Overall results suggest that those BST films have acceptable properties f3r applications as room-temperature tunable elements.nts.