The purpose of this paper is to establish an effective inspection system by using OMM (On-Machine Measurement) system based PC-NC. This system can reduce manufacturing lead time because part is inspected each process. Inspection process planning is accomplished by determining the number of measuring points, their location, measuring path using fuzzy logic, Hammersley method, traveling salesperson problem. Inspection with contacted sensor improve quality as inspection feature is developed to based machining feature. This method is tested by simulation and experiment, then analyzed measuring data and geometry tolerance.