- 바이몰프 PZT 캔틸레버 특성평가 및 응용연구
- ㆍ 저자명
- 김석삼,채영훈,권현규
- ㆍ 간행물명
- 윤활학회지
- ㆍ 권/호정보
- 2003년|19권 3호|pp.133-138 (6 pages)
- ㆍ 발행정보
- 한국윤활학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The characteristics for bimorph PZT cantilever of laboratory-fabricated have been evaluated experimentally. The deflections of cantilever with PZT are result from a capillary force between a water drop and a tip of cantilever. The output voltage due to deflect cantilever are depend on the tip shape and thickness of cantilever. We applied a bimorph PZT cantilever to oil thickness measurement. This reasonable concept is that the output voltage be caused by different defected characteristics between oil and surface. Experimental results demonstrated that the high measurement accuracy of the oil film thickness is obtained from the probe.