The purpose of this study is to evaluate the polymerization ability of three different light sources by microhardness test. Stainless steel molds of 1, 2, 3, 4 and 5 mm in thickness of 7 mm in diameter were prepared. The hybrid composite Z100 was packed into the hole of the mold and curing light was activated for designated time. Three different light sources, conventional halogen, light emitting diode, and plasma arc, were used for curing of composite. Two different curing times applied ; one is to follow the manufacturers recommendation and the other is to extend the curing time of LED and plasma arc for balancing the light energy with halogen. Immediately after curing, the Vickers hardness was measured at the bottom of specimen. The results were as follows. 1 The composite cured with LED showed equal to higher microhardnesss than halogen. 2. The composite was cured with plasma arc by manufacturers recommendation showed lowest micro-hardness at all thickness. However, when curing time was extended, microhardness was higher than the others. In conclusion, this study suggested that plasma arc needs properly extended curing time.