- 압전 구동 방식의 Polydimethylsiloxane(PDMS) 마이크로 펌프
- ㆍ 저자명
- 김진호,김영호,김용상
- ㆍ 간행물명
- 전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문
- ㆍ 권/호정보
- 2003년|52권 10호|pp.487-491 (5 pages)
- ㆍ 발행정보
- 대한전기학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$mu extrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${mu}ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${mu}ell$/min and 173Pa respectively for the above mentioned deflection conditions.