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Optical and structural properties of metal-dielectric near-infrared cutoff filters for plasma display panel application
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  • Optical and structural properties of metal-dielectric near-infrared cutoff filters for plasma display panel application
  • Optical and structural properties of metal-dielectric near-infrared cutoff filters for plasma display panel application
저자명
Lee. Jang-Hoon,Lee. Kwang-Su,Hwangbo. Chang-Kwon
간행물명
韓國眞空學會誌
권/호정보
2003년|12권 1호|pp.88-91 (4 pages)
발행정보
한국진공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Electromagnetic interference shielding and near-infrared cutoff filters for plasma display panel application were designed and fabricated by radio frequency magnetron sputtering. Three types of the filters were prepared: the basic structure of type A consisted of [$TiO_2$ Ti Ag $TiO_2$]; type B, of [$TiO_2$ ITO Ag $TiO_2$]; type C, of [$TiO_2$ ITO Ag ITO $TiO_2$]. Ti and ITO layers deposited on Ag layers were employed as barriers to prevent the oxidation and the diffusion of Ag film into the adjacent oxide layers. Optical, electrical, chemical, and structural properties were investigated, and the result shows that the filters with the ITO barrier layers provided an enhancement in transmittance in the visible owing to a lower absorption of ITO layers than Ti layers. Type C filter showed better optical and electrical performances and smoother surface roughness than Type B and C filters: the average sheet resistance was as low as 1.51 $OmegaBox$ (where $square$ stands for a square film), the peak transmittance in the visible was as high as 78.2 %, and the average surface roughness was 1.48 nm.