The permeation characteristics of the wastewater containing Si fine particles were examined by ultrafiltration using the polyolefin tubular membrane module. Flux with time was due to the growth of Si cake deposited on the membrane surface and the pore plugging by fine particles. The rate of flux decline in the initial stage increased with the trans-membrane pressure. The pore blocking resistance was the dominant resistance at the initial period of filtration and the cake resistance began to dominate with the initial pore blocking resistance. The larger pores compared with the fine particles, the more the membrane pores could be blocked by the fine particles. Before and after treatment, the distribution of particle size was shifted toward to the left. Then, the average size of fine particles in the permeate was 20 nm.