- 열 화학 기상 증착법을 이용한 탄소 나노 튜브 전계 방출 소자의 제조
- ㆍ 저자명
- 유완준,조유석,최규석,김도진,김효진,윤순길,Yu. W.J.,Cho. Y.S.,Choi. G.S.,Kim. D.J.,Kim. H.Y.,Yoon. S.K.
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2003년|13권 5호|pp.333-337 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We report a new fabrication process for carbon nanotube field emitters with high performance. The key of the fabrication process is trim-and-leveling the carbon nanotubes grown in trench structures by employing a planarization process, which leads to a uniform distance from the carbon nanotube tip to the electrode. In order to enable this processing, spin-on-glass liquid is applied over the CNTs grown in trench to have them stubborn adhesion among themselves as well as to the substrate. Thus fabricated emitters reveal an extremely stable emission and aging characteristics with a large current density of 40 ㎃/$ extrm{cm}^2$ at 4.5 V/$mu extrm{m}$. The field enhancement factor calculated from the F-N plot is $1.83${ imes}$10^{5}$</TEX> $cm^{-1}$ , which is a very high value and indicates a superior quality of the emitter originating from the nature of open-tip and high stability of the carbon nanotubes obtained new process.