The effect of gas composition on the discharge characteristics and the ozone production in silent discharge (SD) process was investigated. The major gas components, $N_2$, $O_2$, and $H_2O$ influence the discharge properties according to their relative magnitude of ionization thresholds and electron affinities. The generated amount of ozone increased with the discharge energy by increasing the electron mean energy. The higher oxygen content injected, the higher ozone produced. A small amount of water vapor significantly lowered the discharge onset voltage by the ionization threshold decreasing effect and high electrical conductivity. However, the further increase of water vapor contributes to decrease the electron density by the electron affinity The addition of water greatly reduced the ozone generation through the formation of OH radical and the catalytic ozone destruction process.