This paper describes a Multi-step Digitizing Method and Reverse Model generation algorithm for improvement of reverse engineering accuracy. Reverse engineering is the process of reproducing computational model by directly extracting geometric information on the physical objects. For the improvement of measuring data accuracy, we propose a multi-step digitizing method. First, measuring cloud-of-point by use of a laser scanning system. Second, gathering digitizing data by a scanning touch probe. Fine digitizing plan generated from coarse surface model directly from the cloud-of-point and it allows CMM more accurate scanning data. Finally in this paper we propose the algorithm of generating NURB surface from more accurate measuring points.