The Objective of this study is to investigate the effect of internal swiller angle and swirl chamber aspect ratio of nozzle on spray characteristics for application of spray system in micro fabrication process. The macro-spray characterictics such as the spray angle and breakup process were obtained by photographs illustrating atomization. The micro-spray characteristics such as droplet size and axial velocity were measured by using PDA with swirler angle and swirl chamber aspect ratio. The swiller angles were $13.5^{circ},;27^{circ},;and;40.5^{circ}$. The swirl chamber aspect ratios were 1.2, 1.6, and 2.0. It was found that the smaller swirl chamber aspect ratio was, the larger axial velocity and drop size were.