Nitrided compound layer and diffusion layer structure were observed by SEM. The compound layer and the constituent of nitrided surface of STS 304, STS 316, STS 410 and SACM 645 steel were analysed using EMPA and XRD respectively. The depth of nitriding layer that is obtained from similar nitriding condition decrease in the order of SACM 645 > STS 410 > STS 316 > STS 304. Result of phase transformation of the nitrided at $550^{circ}C$ by XRD analysis were as follows; The austenitic stainless steel was mainly consist of $Cr_2N$ accompanying with $Fe_4N$ and $Fe_{2-3}N$ phase and martensitic stainless steel was mainly consist of present $Fe_{2-3}N+Cr_2N$ phase, but SACM 645 steel was $Fe_{2-3}N$ phase present only.