In this study, to find out the reason of deterioration in surface roughness of steel and cast iron after Tufftride, it has been investigated on the relation between the surface roughness and various factors such as the evolution of compound layer, surface morphology, and surface hardness, and change of pore ratio in the compound layer during Tufftride at $580^{circ}C$. It is found that the surface roughness was increased with the evolution of compound layer during Tufftride of steel and cast iron. The change of surface roughness after Tufftride was reduced with decreasing tho content of carbon and cementite ($Fe_3C$) in the materials. in the cast irons, the various shaped graphites that was exposed to the surface should induce the discontinuous growth of the compound layer, and this resulted in the incoherent interfaces between matrix and compound layer and the deterioration of surface roughness. In the steels, the existence of cementites in the matrix resulted in the incoherent interfaces between matrix and compound layer. It is considered that during Tufftride the surface roughness must be mainly influenced by the formation of the incoherent interface between compound layer and matrix that is affected by some factors such as the microstructure, the composition, and the hardness of the matrix.