- Cr2O<Sub>3 후막의 암모니아 가스 감지 특성
- ㆍ 저자명
- 조철형,박기철,마대영,김정규,Cho. Chul-Hyung,Park. Ki-Cheol,Ma. Tae-Young,Kim. Jeong-Gyoo
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 2004년|13권 6호|pp.424-429 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$Cr_{2}O_{3}$ thick films were fabricated by screen printing method on alumina substrates and annealed at $700^{circ}C$, $800^{circ}C$, and $900^{circ}C$ in air, respectively. Structural properties examined by XRD and SEM showed (116) dominant $Cr_{2}O_{3}$ peak and increased grain sizes with the annealing. The resistance of the films decreased with increasing the annealing temperature. Gas sensing characteristics to $NH_{3}$, CO, $C_{4}H_{10}$, and NO gases showed sensitivity only to $NH_{3}$ gas. $Cr_{2}O_{3}$ thick films annealed at $700^{circ}C$ had the sensitivity of about 15 % for 100 ppm $NH_{3}$ gas at the working temperature of $300^{circ}C$. The thick films had good selectivity to the $NH_{3}$ gas. The response time to $NH_{3}$ gas was about 10 seconds.