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적층형 압전밸브의 설계, 제작 및 특성
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  • 적층형 압전밸브의 설계, 제작 및 특성
저자명
정귀상,김재민,윤석진,정순종,송재성,Chung. Gwiy-Sang,Kim. Jae-Min,Yoon. Suk-Jin,Jeong. Soon-Jong,Song. Jae-Sung
간행물명
센서학회지
권/호정보
2004년|13권 3호|pp.230-235 (6 pages)
발행정보
한국센서학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{ imes}10^{-8}pa{codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.