- 고감지전압 및 가지전극을 이용한 고정도 정전용량형 미소가속도계
- ㆍ 저자명
- 한기호,조영호
- ㆍ 간행물명
- 大韓機械學會論文集. Transactions of the Korean Society of mechanical engineers. A. A
- ㆍ 권/호정보
- 2004년|28권 1호|pp.1-10 (10 pages)
- ㆍ 발행정보
- 대한기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a navigation garde capacitive microaccelerometer, whose low-noise high-resolution detection capability is achieved by a new electrode design based on a high-amplitude anti-phase sense voltage. We reduce the mechanical noise of the microaccelerometer to the level of 5.5$mu extrm{g}$/(equation omitted) by increasing the proof-mass based on deep RIE process of an SOI wafer. We reduce the electrical noise as low as 0.6$mu extrm{g}$/(equation omitted) by using an anti-phase high-amplitude square-wave sense voltage of 19V. The nonlinearity problem caused by the high-amplitude sense voltage is solved by a new electrode design of branched finger type. Combined use of the branched finger electrode and high-amplitude sense voltage generates self force-balancing effects, resulting in an 140% increase of the bandwidth from 726㎐ to 1,734㎐. For a fixed sense voltage of 10V, the total noise is measured as 2.6$mu extrm{g}$/(equation omitted) at the air pressure of 3.9torr, which is the 51% of the total noise of 5.1$mu extrm{g}$/(equation omitted) at the atmospheric pressure. From the excitation test using 1g, 10㎐ sinusoidal acceleration, the signal-to-noise ratio of the fabricated microaccelerometer is measured as 105㏈, which is equivalent to the noise level of 5.7$mu extrm{g}$/(equation omitted). The sensitivity and linearity of the branched finger capacitive microaccelerometer are measured as 0.638V/g and 0.044%, respectively.