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저자명
한기호,조영호
간행물명
大韓機械學會論文集. Transactions of the Korean Society of mechanical engineers. A. A
권/호정보
2004년|28권 1호|pp.1-10 (10 pages)
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

This paper presents a navigation garde capacitive microaccelerometer, whose low-noise high-resolution detection capability is achieved by a new electrode design based on a high-amplitude anti-phase sense voltage. We reduce the mechanical noise of the microaccelerometer to the level of 5.5$mu extrm{g}$/(equation omitted) by increasing the proof-mass based on deep RIE process of an SOI wafer. We reduce the electrical noise as low as 0.6$mu extrm{g}$/(equation omitted) by using an anti-phase high-amplitude square-wave sense voltage of 19V. The nonlinearity problem caused by the high-amplitude sense voltage is solved by a new electrode design of branched finger type. Combined use of the branched finger electrode and high-amplitude sense voltage generates self force-balancing effects, resulting in an 140% increase of the bandwidth from 726㎐ to 1,734㎐. For a fixed sense voltage of 10V, the total noise is measured as 2.6$mu extrm{g}$/(equation omitted) at the air pressure of 3.9torr, which is the 51% of the total noise of 5.1$mu extrm{g}$/(equation omitted) at the atmospheric pressure. From the excitation test using 1g, 10㎐ sinusoidal acceleration, the signal-to-noise ratio of the fabricated microaccelerometer is measured as 105㏈, which is equivalent to the noise level of 5.7$mu extrm{g}$/(equation omitted). The sensitivity and linearity of the branched finger capacitive microaccelerometer are measured as 0.638V/g and 0.044%, respectively.