In this paper, cracking threshold for nanoindentation is analyzed by using 3D finited-element method. The analysis by maximum principal stress criterion can obtain the reliable results for determining to crack initiation location and load. Because the ratio of maximum principal stress to indentation depth for Victors indentation is smaller than flat-plane-column indentation and cracking for Victors indentation occurs from the inner part of specimen difficult to measure crack length, the nanoindentation facture test for flat-plane-column indentation is more effective.