- 이산화질소 감지용 다중벽 탄소나노튜브 가스센서의 제작 및 감응 특성
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- 조우성,문승일,김영조,이윤희,주병권
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- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2004년|17권 3호|pp.294-298 (5 pages)
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- 한국전기전자재료학회
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- 정기간행물| PDF텍스트
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- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
Carbon nanotubes(CNTs) were synthesized by thermal chemical vapor deposition(CVD) method. To fabricate CNT gas sensor, catalyst metal layer was deposited on microstructure. The CNT gas detecting layer was grown by thermal CVD method on the catalyst metal layer. In order to investigate the gas sensing characteristics of the fabricated CNT gas sensor, it was exposed in NO$_2$ gas and sensitivity, response, and recovery time were measured. As the result, this sensor has better reproductibility and faster recovery time than another CNT gas sensors.