In high-speed gas-levitation applications a high compressibility number may bring a numerical difficulty in predicting generated pressure profiles accurately as it causes erroneous sudden pressure overshoot and oscillation in the trailing-edge. To treat the problem, in this study an exact exponential high-order shape function is introduced in the FE lubrication analyses. It is shown by various example applications that the high-order shape function scheme can successfully subdue undesired pressure overshoot and oscillation.