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Rf co-sputtering으로 제작한 MgB$_2$ 박막의 in-situ 열처리 효과
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  • Rf co-sputtering으로 제작한 MgB$_2$ 박막의 in-situ 열처리 효과
  • In-situ Annealing of $MgB_2$ Thin Films Prepared By rf Magnetron Co-Sputtering
저자명
김윤원,안종록,이순걸,이규원,김인선,박용기
간행물명
Progress in superconductivity
권/호정보
2004년|5권 2호|pp.105-108 (4 pages)
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한국초전도학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We have studied effects of in-situ annealing on the fabrication of superconducting MgB$_2$ thin films prepared by rf magnetron co-sputtering. The Films were deposited on A1$_2$O$_3$ (1102) substrates at room temperature by using Mg and B targets. To trap remnant $O_2$ gas in the chamber, we used 20 mtorr Af sputter-gas balanced with 5 mol % of H$_2$ gas. To enhance adhesion to the substrate a thin layer of B was deposited prior to the codeposition of Mg and B. After completion of the film deposition, an additional Mg layer was deposited on top to compensate for Mg loss during the subsequent in-situ annealing. We have investigated the effects of two most important annealing parameters that are the Mg-to-B composition ratio and the annealing temperature. The range of the Mg-to-B composition ratio was from 0.42 to 0.85, and that of the annealing temperature was 500 $^{circ}C$∼750 $^{circ}C$. The Best result was obtained for the composition ratio of about 10% Mg excess from the stoichiometry and the annealing temperature of 700 $^{circ}C$. Based on these results, we obtained films with T$_{c}$ : 36.5 K by further refining the fabrication process.s.