We have prepared new polyelectrolytes containing trialkoxysilyl groups by copolymerizing 3-(trimethoxysilyl)propyl methacrylate (TSPM) with either [2-(methacryloyloxy)ethyl]trimethyl ammonium chloride (METAC), [2-(methacryloyloxy)ethyl]dimethyl propyl ammonium bromide (MEDPAB), or [2-(acryloyloxy)ethyl]trimethyl ammonium chloride (AETAC). The copolymers TSPM/METAC, TSPM/MEDPAB, and TSPM/METAC having compositions of 15/85, 10/90, and 5/95, respectively, were self-crosslinkable polyelectrolytes that possess humidity-sensitive properties. We measured the impedances of the copolymers at various relative humidities (RHs) and found that the resistance was dependent on the content of METAC, MEDPAB, or AETAC. The impedance changed from 10$^$7/ $Omega$ at 20% RH to 10$^3$ $Omega$ at 95% RH, which is quite a suitable range for a humidity sensor that is to be utilized at ambient humidity. We also performed tests of the materials temperature dependence, hysteresis, response time, and water durability.