- ISDG를 이용한 다결정실리콘 기계적 물성값 측정법
- ㆍ 저자명
- 오충석
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2004년|21권 7호|pp.171-178 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Techniques and procedures are presented for measuring mechanical properties on thin-film Polysilicon. Narrow platinum lines are deposited 250 ${mu}{ extrm}{m}$ apart on tensile specimens that are 3.5 ${mu}{ extrm}{m}$ thick and 600 ${mu}{ extrm}{m}$ wide. Load is applied by a piezo-actuator and by hanging weights. Strain is measured by an ISDC at temperatures up to 500 $^{circ}C$. Measurements of the elastic modulus with jig modifications, loading speed and temperature change are presented first. And then, the preliminary data for the coefficient of thermal expansion and creep behavior are presented as a reference.