The relative efficiency of loan projects of information technology promotion fund is measured using Data Envelopment Analysis. Information technology promotion project is supervised by the Ministry of Information and Communication and is managed by the Institute of Information Technology Assessment. Among all the projects of information technology supported by this fund, this study deals with the themes that have been completed from 2000 to 2002. With multiple input and output data including the amount of fund, the period of study, the rate of increase in revenue, the increase in the amount of export and the increase in the number of patent, the relative efficiency scores of all the 119 subjects were calculated in CCR and BCC models of DEA. From the reference sets of some inefficient Decision Making Units, the causes of their inefficiency were analyzed. To compare the relative efficiencies among various DMUs, Super-Efficiency Ranking Method and Logistic Regression Model were used. As the result of this study, it was shown that W promotion funds in the fields related to mobile technology, visual equipment and communication device were used most efficiently.