- 다중 디스펜싱 방법에 의한 UV-나노임프린트 리소그래피
- ㆍ 저자명
- 심영석,손현기,신영재,이응숙,정준호
- ㆍ 간행물명
- 제어·자동화·시스템공학 논문지
- ㆍ 권/호정보
- 2004년|10권 7호|pp.604-610 (7 pages)
- ㆍ 발행정보
- 제어로봇시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. Since the resolution of transferred nanostructures depends strongly upon that of nanostamps, the nanostamp fabrication technology is a key technology to UV-NIL. In this paper, a $5 imes5 imes0.09$ in. quartz stamp whose critical dimension is 377 nm was fabricated using the etching process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. To effectively apply the fabricated 5-in. stamp to UV-NIL on a 4-in. Si wafer, we have proposed a new UV-NIL process using a multi-dispensing method as a way to supply resist on a wafer. Experiments have shown that the multi-dispensing method can enable UV-NIL using a large-area stamp.