A variational approximation procedure is introduced to study the contact stresses between a representative asperity and a feature generally happening in superfinishing processes such as FAM. After a description of the model under consideration is presented, a system of governing equation for the model is derived fullowed by the assumptions made in order to make progress in model development. Final computation is made to evaluate contact stresses on an elastic asperity tip in small scale in size and a computer simulation is performed for detailed surface profile variations on a representative feature. Numerical results are presented along with a discussion of the conclusions that can be drawn from this analysis.