- 원자 현미경을 이용한 접촉 면적에 따른 마찰 및 마멸 특성 분석
- ㆍ 저자명
- 최덕현,황운봉,Choi. Dukhyun,Hwang. Woonbong
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2004년|21권 12호|pp.167-173 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Recently, it has been reported that frictional behavior at nanometer scale can be different from that at macro scale. In this article, friction and wear tests were conducted using an AFM to investigate the effect of real contact area on the coefficient of friction and wear property. SiO$_2$, Hica, and SiGe were used in friction test and the AFM tip was Si$_3$N$_4$. The real contact area between an AFM tip and flat surface was calculated by the Johnson-Kendall-Roberts (JKR) theory. Wear specimen was Mica, and the diamond tip was used. We found that the coefficient of friction is constant below a critical area, but it is degraded over the area. Moreover, it is found that wear depth increased rapidly from a certain load and was degraded as a function of the number of the scanning cycles. Also, the range of scanning velocity used in this study had little effect on the wear depth.