The particle amount monitoring technique using ultrasound is proposed to determine the proper maintenance time of the filter in the supply process of pure gas in the unit of oxygen plant. There are advantages that it is adaptable in high temperature and high pressure, and it is not disturbed by being exposed in the gas flow, and it can be implemented very economically. The applicability of the ultrasonic technique is pre-studied through the theoretical analysis for the dependency of attenuation of ultrasonic wave on the particles in the gas flow. For the purpose, absorption, scattering and dispersion models are considered, and the attenuation by absorption and the change rate of the propagation speed are calculated fur the specific range of particle size and the ultrasonic wave frequency. It was expected by simulation that the absorptive attenuation by particles was the most sensitive to the change of particle amount. The experimental result showed high correspondence with the theoretical expectation so that this ultrasound attenuation measurement was proved to be highly effective for monitoring the amount of floating particles in the gas flow.