- 반도체 공정에 이용되는 지능형 천장 반송 시스템의 최적 중앙제어
- ㆍ 저자명
- 오진석,김학선,Oh. Jin-Seok,Kim. Hak-Sun
- ㆍ 간행물명
- 韓國舶用機關學會誌
- ㆍ 권/호정보
- 2004년|28권 7호|pp.1159-1164 (6 pages)
- ㆍ 발행정보
- 한국마린엔지니어링학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
There is an Overhead Hoist Transport(OHT) for delivering the wafer in semiconductor processing. The transfer system is consists of carrier vehicle. rail, and support. OHTCMS(OHT Control and Management System) has to take the feature, such as the optimal control and integration with several OHT. In this paper, ESRA(Efficiency of Shortest - Route Algorithms) is proposed which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.