- 스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구
- ㆍ 저자명
- 김동원,박정원,김상호,박종수,Kim. Dong-Won,Park. Jeong-Won,Kim. Sang-Ho,Park. Jong-Su
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 2004년|37권 5호|pp.243-248 (6 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$ extrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.