- 이온플레이팅법으로 제조된 TiAlLaN계 박막의 산화속도
- ㆍ 저자명
- 서성만,이기선,이기안,Seo. Sung Man,Lee. Kee Sun,Lee. Kee-Ahn
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2004년|14권 3호|pp.163-167 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
TiAl(La)N thin films were oxidized in vacuum of about 7 Pa to reduce the oxidation of WC-Co as a substrate. The oxidation rate constants of the thin films were quantified by an assumption of parabolic oxidation. Increasing AI content significantly decreased the parabolic oxidation rate constant. A simultaneous addition of AI and La was more effective to reduce the oxidation rate. The parabolic oxidation rate constant of $Ti_{0.66}$ $Al_{0.32}$ $La_{ 0.02}$N thin film at 1273 K showed about ten times lower than that of TiN. The addition of a small amount of La with Al induced the preferential formation of dense $alpha$ $-Al_2$$O_3$ film in oxide film, leading to the abrupt reduction of oxidation rate.