- Pd에 의해 결정화 속도가 향상된 Ni-MILC에서 기하학적 형상이 결정화 속도에 미치는 영향
- ㆍ 저자명
- 김영수,주승기,Kim. Young-Su,Joo. Seung-Ki
- ㆍ 간행물명
- 한국재료학회지
- ㆍ 권/호정보
- 2004년|14권 7호|pp.500-504 (5 pages)
- ㆍ 발행정보
- 한국재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
It is well-known that adjacent Pd-MILC enhanced the rate of Ni-MILC. And the phenomena can be explained by tensile stress propagation between amorphous silicon and Pd silicide which is catalyst of crystallization. In this study, we modified tensile stress by changing geometry of amorphous silicon to prove that there is a direct relation between tensile stress and Ni-MILC rate enhancement. When the tensile stress concentrated, the Ni-MILC rate was enhanced more(14.5 ${mu}m/hr$) by Pd-MILC while the conventional Pd-MILC enhanced Ni-MILC rate was 11 ${mu}m/hr$. As the result we can be sure that the tensile stress causes the enhancement of Ni-MILC rate.