Thermal distortion of non-contacting mechanical seals with inclined rubbing surfaces is affected by friction heat between seal ring and seal seat. The circulation fluid along the inclined rubbing surfaces maintains cooling friction heat and lubrication between the sealing surfaces of mechanical seal with an inclined surface. Mechanical seals with inclined sealing surfaces may be useful for reducing the frictional heating and power loss because of the introduction of cooling fluids to the sealing gap between seal ring and seal seat. From the FEM computed result shows that the thermal behavior and von Mises stress of sealing faces with an inclined angle 60 are much reduced in comparison of the conventional mechanical face seal with rectangular sealing surfaces.